PROGRAMMABLE SPIN COATING UNIT:-
MAKE: HE (GMP/ISO 9001 – 2015/GMP/CE Certified )
Model: HSC – 9000
Technical Specification: -
• Polypropylene Working Chamber (removable), size 6-inch dia, with transparent photo resist lid with interlock safety switch.
• 500 – 9000 RPM
• Accuracy<±0.5% of Full Speed
• Microprocessor Programmable Speed control with respect to time Preset editable programs of 1 program X 64 step
• Real time display of RPM, time and program stamps
• Nonvolatile program memory
• Input & control through soft touch key pad.
• Vacuum release switch
• Substrate size from 0. 04sq.inch (28 sq.mm) to 4.0 sq. inch
(for glass substrate) & 20.0 sq. inch (for silicon wafers)
• Vacuum chuck: derlin made circular substrate holders of Dia 0.5”, 1”, 1.5”, 2.0” inch
• Microprocessor control A C brush less motor
• Acceleration 2000 rpm/sec (Maximum) use settable
• Calibration option.
• Vacuum Dial gauge.
• Frame: Epoxy coated MS.
• Facility for interlocking with Vacuum Pump.
• Tubing for Vacuum.
• Gas Purging Attachment for Nitrogen.
• Spill drainage facility
• To operate on 230V ± 10%, 1 phase 50 Hz AC only.
• Maximum Power 190W, Current 1.0 Amp.
Vacuum Pump: -
Make: HE (NSIC Regd, MSME Regd, ISO 9001 – 2015/14001-2015/13485-2016/FDA/ GMP/CE Certified)
Model Technical Name
HE115 N Flow rate 50 Hz
42 L/min
60 Hz 60 Hz
50 L/min
Ultimate vacuum Partial Pressure
Total Pressure Total Pressure
Power
Inlet Port
Model Technical Name
HE115 N Flow rate
